| 摘要 |
Provided are a terminal structure capable of preventing damage due to an excessive force and having high sealing property, and a vacuum pump to which the terminal structure is applied. When a control device ( 400 ) undergoes transition to a turbo molecular pump main body ( 300 ), a cylindrical wall ( 603 ) of a female connector ( 600 ) is fit-engaged with a cavity ( 504 ) of a male connector ( 500 ). As the connection progresses, head portions ( 511 a) at one ends of male pins ( 511 ) are inserted into pin insertion elongated holes ( 624 ). When, after that, a forward end of the cylindrical wall ( 603 ) of the control device ( 400 ) abuts a bottom portion ( 501 ) of the female connector ( 600 ), the female connector ( 600 ) on the control device ( 400 ) side, which is of low rigidity, is pushed back against an elastic force of waved washers ( 613 ). As a result, even when an excessive force is applied to the female connector ( 600 ) and the male connector ( 500 ), the force can be mitigated through deformation of the waved washers ( 613 ), so there is no fear of the connectors suffering damage.
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