| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and device for measuring a coating thickness capable of accurately and stably measuring the coating thickness of a sample to be observed from the minimum detection results related to a secondary signal obtained from the minimum standard samples and samples to be observed, and to provide a method and device for manufacturing the samples. <P>SOLUTION: The coating thickness measurement method includes: a standard data creation step S1 for creating standard data in a relationship between the acceleration voltage of electron beams in a standard sample and the strength ratio of secondary signals to the electron beams; a reference value extraction step S2 for extracting an acceleration voltage at the change point of standard data as a reference value; a measurement data creation step S3 for creating measurement data in a relationship between the acceleration voltage of electron beams and the strength ratio of secondary signals to the electron beams by applying electron beams to a target sample; a characteristic value extraction step S4 for extracting the acceleration voltage of the change point in measurement data as a characteristic value; and an evaluation step S5 for evaluating the coating thickness of the target sample to the coating thickness of a standard sample, based on the comparison of the reference value and the characteristic value. <P>COPYRIGHT: (C)2009,JPO&INPIT |
