| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coater which can enhance precision in attachment while shortening the work time by suppressing the impact of the division part of a rail on constant speed travel even when a block structure is employed in the rail on which a gantry travels, and facilitating the attachment work of the divided rail. <P>SOLUTION: The coater comprises a stage for holding a substrate, a plurality of divided rails extending in a specific direction along the stage, and a unit for coating the substrate with coating liquid wherein the rail has a portion on which the coating unit travels from the start of ejecting the coating liquid to the end of ejecting the coating liquid, and an extension of the coating/traveling portion in a specific direction. The portion for dividing the rail is formed on the extension. <P>COPYRIGHT: (C)2009,JPO&INPIT |
