| 摘要 |
<P>PROBLEM TO BE SOLVED: To continuously form a fluoride thin film of magnesium fluoride or the like having reduced optical absorption of visible light and having satisfactory adhesion on a plastic base material by a vacuum deposition process at a high speed and also at an extremely stable film deposition rate. <P>SOLUTION: The vacuum deposition device within a vacuum tank (1) is provided with: an unwinding part (2) continuously unwinding a plastic film (2); a winding part (3) winding the plastic film (4) unwound from the unwinding part (2); a main roll (5) arranged between the unwinding part (2) and the winding part (3); a vapor deposition material (6) composed of a solid material having high material density and fine vacancies or a granule material having high pack density or a mixed material of the solid material and the granule material, also comprising a fluoride essentially consisting of magnesium fluoride and also arranged so as to be confronted with the main roll (5); an electron gun (7) emitting an electron beam to the evaporation material (6); and a feeding means continuously feeding the vapor deposition material (6). <P>COPYRIGHT: (C)2009,JPO&INPIT |
