摘要 |
PROBLEM TO BE SOLVED: To provide an ozone water generating apparatus capable of easily and efficiently generating high purity and high concentration ozone without incorporating metals or the like from an anode and degradating the anode electrode or solid high molecular electrolyte membrane. SOLUTION: The ozone water generating apparatus is provided with the solid high molecular electrolyte membrane, and the anode electrode and a cathode electrode which are arranged to face across the solid high molecular electrolyte membrane. The anode electrode has a conductive thin film made of diamond-like carbon in which crystalline component is mixed with amorphous component, and the conductive thin film is formed so as to cover at least a part of an anodic base material or the solid high molecular electrolyte membrane. COPYRIGHT: (C)2009,JPO&INPIT |