| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a stem for a magnetron having a lead part, a metalized layer and a plated layer with a high yield. SOLUTION: This manufacturing method of a stem for a magnetron having a stem body part formed of a ceramics sintered body, the metalized layer formed on the stem body part, and the lead part with the stem inserted therein is characterized by including processes of: preparing the stem body part formed of an alumina sintered body containing Mn; and applying Mo-Mn-based paste to a part of the stem body part, drying it at 50-100°C in a reductive atmosphere, and forming the metalized layer by baking it. Thereby a yield can be improved, and the joint strength of the metalized layer can be improved. COPYRIGHT: (C)2009,JPO&INPIT
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