| 摘要 |
A method and an apparatus are provided for fault detection based on a multivariate sub-model. A method and apparatus is provided for fault detection on a multivariate sub-model. The method comprises defining a first model associated with a first sub-system of a processing tool, defining a second model associated with a second sub-system of the processing tool and detecting a fault associated with at least one of the first sub-system based on the first model and the second sub-system based on the second model.
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