发明名称 IRRADIANCE PULSE HEAT-TREATING METHODS AND APPARATUS
摘要 <p>A method of heat-treating a workpiece includes generating an initial heating portion and a subsequent sustaining portion of an irradiance pulse incident on a target surface area of the workpiece. A combined duration of the initial heating portion and the subsequent sustaining portion is less than a thermal conduction time of the workpiece. The initial heating portion heats the target surface area to a desired temperature and the subsequent sustaining portion maintains the target surface area within a desired range from the desired temperature. Another method includes generating such an initial heating portion and subsequent sustaining portion of an irradiance pulse, monitoring at least one parameter indicative of a presently completed amount of a desired thermal process during the irradiance pulse, and modifying the irradiance pulse in response to deviation of the at least one parameter from an expected value.</p>
申请公布号 WO2008131513(A1) 申请公布日期 2008.11.06
申请号 WO2008CA00546 申请日期 2008.03.20
申请人 MATTSON TECHNOLOGY CANADA, INC.;CAMM, DAVID, MALCOLM;MCCOY, STEVE;STUART, GREG 发明人 CAMM, DAVID, MALCOLM;MCCOY, STEVE;STUART, GREG
分类号 H01L21/02;C21D1/34;H01L21/265;H01L21/324 主分类号 H01L21/02
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