| 摘要 |
<P>PROBLEM TO BE SOLVED: To add donor ion of 10 mol% or more to a B site without adding a sintering aid and an acceptor ion in a PZT-based ferroelectric film. <P>SOLUTION: The ferroelectric film has a columnar crystal film structure comprising many columnar crystals and takes as a chief ingredient a perovskite oxide represented by a formula (P):A<SB>1+δ</SB>[(Zr<SB>x</SB>Ti<SB>1-x</SB>)<SB>1-y</SB>M<SB>y</SB>]O<SB>z</SB>. In the formula, A is an A site element that is an element of at least one kind taking Pb as a chief ingredient and Zr, Ti, and M are B site elements, respectively. M is an element of at least one kind selected from a group composed of V, Nb, Ta, and Sb. A relation: 0<x≤0.7, 0.1≤y≤0.4, δ=0, and z=3 are standard. These values may be shifted from a reference within a range where a perovskite structure can be taken. <P>COPYRIGHT: (C)2009,JPO&INPIT |
