发明名称 SUCTION GROOVE CLEANING METHOD AND SUCTION GROOVE CLEANING DEVICE
摘要 PROBLEM TO BE SOLVED: To efficiently carry out the cleaning treatment of a suction groove 2 in a work retaining device which vacuum-sucks a work w placed on the work retaining surface 1a of a work retaining table 1 through the suction groove 2 formed on the work retaining surface 1a. SOLUTION: Outside air is flowed in from the first communication port 3 of the suction groove 2 and the suction groove 2 is purged and cleaned by suction from the second communication port 4 of the suction groove 2 in a state where the whole suction groove is closed by the work w of a closing member placed on the work retaining surface 1a. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008264742(A) 申请公布日期 2008.11.06
申请号 JP20070115274 申请日期 2007.04.25
申请人 OMRON CORP 发明人 SUGIMURA HIROYUKI
分类号 B08B5/02;H01L21/50;H01L21/683 主分类号 B08B5/02
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