DEFORMATION METHOD OF NANO-SIZED MATERIAL USING PARTICLE BEAM, AND NANO-TOOL MANUFACTURED BY THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a deformation method of a nano-sized material using a particle beam, and a nano-tool manufactured by using such a method. SOLUTION: In the deformation method of the nano-sized material using the particle beam, the nano-sized material is irradiated with the particle beam to be bent in a direction of the particle beam. COPYRIGHT: (C)2009,JPO&INPIT