METHOD FOR REMOVING ORGANIC ELECTROLUMINESCENT RESIDUES FROM A SUBSTRATE

摘要

A method for removing organic electroluminescent residues from a substrate extends a lifetime of the substrate and increases efficiency of the process by using a dry etching method. The process gas made of gas including fluorine is provided. The reactive species is provided by activating the process gas within a remote chamber operating in a plasma etching mode by using the plasma energy supply source. The organic electroluminescent residues is volatilized and removed from the substrate by contacting the reactive species with a surface of the substrate.