| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid material supply device for preventing outside gas existing around a chamber sticking to a solid material from being carried in the chamber, in a device for supplying the solid material in the chamber filled with gas different from gas around the chamber. SOLUTION: When carrying the solid material by a carrying means 2, the solid material inputted in a carrying chamber 4 from a carrying chamber material input port 5, is carried toward a carrying chamber material discharge port 6 by the carrying means 2, and is discharged outside the carrying chamber 4 from the carrying chamber material discharge port 6. At this time, the gas different from the periphery of the carrying chamber supplied in the carrying chamber 4 from a carrying chamber gas supply port by a gas supply means, contacts with the solid material in the middle of carrying, and is exhausted outside the carrying chamber 4 from a carrying chamber gas exhaust port. COPYRIGHT: (C)2009,JPO&INPIT
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