THIN FILM BATTERY FABRICATION USING LASER SHAPING

摘要

A method of fabricating a battery comprises selecting a battery substrate having cleavage planes, and shaping the battery with pulsed laser bursts from a pulsed laser beam to control or limit fracture along the cleavage planes. Before or after the shaping step, a plurality of battery component films can be deposited on the battery substrate. The shaping step can be used to cut the battery substrate or to vaporize portions of the films to form shaped battery features, or both. The battery component films include at least a pair of. electrodes about an electrolyte which cooperate to form a battery. Pulsed laser shaping can be used to replace' the use of a mask in the fabrication of shaped battery components. Pulsed laser cutting was also found to work well on thin substrates with a thickness of less than 100 microns.