发明名称 |
Verbesserter Resonator mit Keimschicht |
摘要 |
A thin-film resonator having a seed layer and a method of making the same are disclosed. The resonator is fabricated having a seed layer to assist in the fabrication of high quality piezoelectric layer for the resoantor. The resonator has the seed layer, a bottom electrode, piezoelectric layer, and a top electrode. The seed layer is often the same material as the piezoelectric layer such as Aluminum Nitride (AlN). |
申请公布号 |
DE10320707(B4) |
申请公布日期 |
2008.11.06 |
申请号 |
DE2003120707 |
申请日期 |
2003.05.08 |
申请人 |
AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE. LTD. |
发明人 |
BRADLEY, PAUL D.;LEE, DONALD;FIGUEREDO, DOMINGO A. |
分类号 |
H03H9/15;H03H3/007;H03H3/02;H03H9/02;H03H9/17;H03H9/54 |
主分类号 |
H03H9/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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