| 摘要 |
PROBLEM TO BE SOLVED: To provide a testing apparatus and method whereby the defects of a conductive pattern can be sensed with a high accuracy. SOLUTION: In the testing apparatus and method, a sample having conductive patterns 10 is scanned by an electron beam 20 while the irradiating position of the electron beam 20 is vibrated by a predetermined amplitude when irradiating each conductive pattern 10 by the electron beam 20. Such an electric signal as absorbing currents generated by the irradiation in each conductive pattern 10 and as the voltages caused by the absorbing currents is sensed by using probes 31, 32 and amplifiers. Then, the varying amounts of the electric signals, which are sensed among the respective vibrations when scanning each conductive pattern by the electron beam 20, are so searched as to sense the defect of each conductive pattern 10 from the difference between the varying amounts obtained when such a defect as a high-resistance via 12a exits in the region of the vibration and obtained when the defect does not exist. COPYRIGHT: (C)2009,JPO&INPIT
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