| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for evaluating properties of material to ultrapure water by using ultrapure water with high electric resistance, and to provide a treatment apparatus usable in such the evaluation. SOLUTION: The treatment apparatus includes a pump 21 for pressure-feeding the ultrapure water, a holder 32 detachably holding a member to be treated, and a nozzle 41 connected to a discharge part of the pump for injecting the ultrapure water delivered from the pump to a surface of the member to be treated. The surface of the member to be treated is treated by injecting the ultrapure water on the member to be treated. COPYRIGHT: (C)2009,JPO&INPIT
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