| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign material inspecting device and a foreign material inspection method, capable of inspecting the existence of foreign materials in an assembly line of solid-state imaging element and optical components, and preventing an assembly with foreign material mixed from being delivered in a post-process. SOLUTION: The foreign material inspecting device is provided with a first imaging camera 15 for imaging a jointing surface 2a of the optical component 2 and a second imaging camera 28 for imaging a jointing surface 1a of the solid-state imaging element 1. The optical component 2 held by a holding mechanism part 32 is cured temporarily with an adhesive, such as, UV resin on the solid-state imaging element 1 mounted on an adjusting base 13 to be jointed with the solid-state imaging element 1. In this state, the jointing surface of the solid-state imaging element 1 and the optical component 2 is imaged by the solid-state imaging element 1. The obtained respective image data is stored in a storage means 43, an image processing part 44 detects the contrasting density and distribution state generated by the foreign materials of each pixel, as gradation information and distribution information, and detects the existence of the foreign materials from the relation with previously set prescribed luminance data. COPYRIGHT: (C)2009,JPO&INPIT
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