| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspecting device causing no correction error even if there is a change in frequency setting during a period from the implementation of calibration to implementation of phase difference measurement via a DUT. SOLUTION: The semiconductor inspecting device for applying a high frequency signal from a signal generating module to an input terminal of a semiconductor under inspection and measuring a signal of an output terminal of the semiconductor by a high frequency measuring module, includes a first divider for dividing the high frequency signal into two signals; a second divider for dividing one output signal of the first divider into two signals; a switching means for switching a signal direct or through the semiconductor under inspection from the other output signal of the first divider and one output signal of the second divider; a first high frequency measuring module for inputting the output signal of the switching means; and a second high frequency measuring module for inputting the other output signal of the second divider. COPYRIGHT: (C)2009,JPO&INPIT
|
