| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck table mechanism maintaining a height position of a chuck table at a prescribed position even when a motor to rotate the chuck table heats. SOLUTION: This chuck table mechanism furnished with the chuck table to hold a workpiece is furnished with: a chuck table supporting base to support the chuck table; a fixing and supporting member arranged on an upper surface of the chuck table supporting base; a rotating supporting member externally fitted on an outer peripheral surface of the fixing supporting member free to rotate through a bearing and to support the chuck table on an upper end; a motor arranged on the chuck table supporting base; and a motive power transmitting means to transmit driving force of the motor to the rotating supporting member. COPYRIGHT: (C)2009,JPO&INPIT
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