发明名称 Programmable mask and method of fabricating biomolecule array using the same
摘要 The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet ("UV") light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.
申请公布号 US2008273128(A1) 申请公布日期 2008.11.06
申请号 US20080213244 申请日期 2008.06.17
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 JUNG MOON YOUN;SHIN DONG HO;KIM YOUNG JUN;PARK SE HO;PYO HYEON BONG;CHOI CHANG AUCK
分类号 G02F1/13 主分类号 G02F1/13
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