| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of semiconductor device which can form semiconductor layer with a constricting structure without being oxidized, and to improve the reliability of the semiconductor device. SOLUTION: A manufacturing method of surface-emitting laser element 100, equipped with a plurality of semiconductor layers by being laminated, comprises a mask-forming process of forming a mask layer 16 on a spacer layer 6; a selective growth process processing, in selective growing a current-constricting layer 7 at a growth temperature which is lower than the removing temperature, at which the mask layer 16 is removed from the spacer layer 6 through heat in a region on the spacer layer 16, other than the mask layer 6; and a mask-removing process of removing the mask layer 16 from the spacer layer 6 through heat, by heating the mask layer 16 to the removing temperature. COPYRIGHT: (C)2009,JPO&INPIT
|
