| 摘要 |
PROBLEM TO BE SOLVED: To provide a formation method of a silicon film capable of utilizing an Si constituent in a liquid silicon material efficiently. SOLUTION: The formation method of a silicon film includes: a process for applying a liquid material including a compound having at least a polymerization starting terminal onto a substrate; a process for applying a liquid material including at least a silicide onto the substrate; and a process for stopping a polymerization reaction. COPYRIGHT: (C)2009,JPO&INPIT
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