| 摘要 |
PROBLEM TO BE SOLVED: To enable accurate measurement of three-dimensional coordinates of a target point, even when a measuring probe of a type which is not displaced in the direction of a drag force received from the surface of an object to be measured. SOLUTION: A measuring probe 15 which supports a measuring globe 33 to be three-dimensional displaceable with respect to a measurement head 29, and is capable of detecting the displacement amount of the measuring globe 33 with respect to the measurement head 29 in a three-dimensional coordinate system, is used. The measuring probe 15 is made to approach a target point; the measuring globe 33 is displaced with respect to the measurement head 29; after that from the direction of this displacement of the measuring globe 33, the measuring probe 15 is made to approach again the object to be measured 13; and this cycle is repeated. Based on the amount of displacement of the measuring globe 33 and the three-dimensional coordinates of the position of the measurement head 29 acquired when the direction of an approach and the direction of a displacement of the measuring globe 33 with respect to the measuring head 29 coincide approximately, the three-dimensional coordinates of the object 13 at a contact point are found. COPYRIGHT: (C)2009,JPO&INPIT
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