发明名称 SURFACE TREATMENT METHOD FOR THERMAL SPRAY COATING, AND SURFACE-TREATED THERMAL SPRAY COATING
摘要 PROBLEM TO BE SOLVED: To provide a surface treatment method for a thermal spray coating by which a dense and smooth surface can easily be formed on a thermal spray coating of a rare earth element oxide without causing cracks, and to provide a surface-treated thermal spray coating obtained thereby. SOLUTION: The surface treatment method for the thermal spray coating is characterized in that the surface of a thermal spray coating of the rare earth element oxide is melted and densified by a laser with the wavelength of≥9μm. According to this invention, the surface of the thermal spray coating of a rare earth oxide can be made dense and smooth by a simple process without generating cracks, and industrial utility value is extremely high. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008266724(A) 申请公布日期 2008.11.06
申请号 JP20070111168 申请日期 2007.04.20
申请人 SHIN ETSU CHEM CO LTD 发明人 KIMURA YUJI
分类号 C23C4/18;C23C4/10;H01L21/3065 主分类号 C23C4/18
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