| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet head which can improve a frequency characteristic by increasing a rate of reaction to a signal, and to provide its manufacturing method. SOLUTION: In the method of manufacturing the inkjet head which stores an ink flown in through an ink channel in a chamber and ejects the ink through nozzles by pressuring a film that defines one surface of the chamber, the method includes a step of forming the chamber by etching a part of one surface of a first substrate, a step of forming the ink channel connected to the chamber by etching a part of the other surface of the first substrate, and a step of joining a second substrate to the one surface of the first substrate so as to cover the chamber. COPYRIGHT: (C)2009,JPO&INPIT
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