| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint mold having a three-dimensional structure pattern with high accuracy and different height to be formed, and a manufacturing method for the imprint mold. SOLUTION: The imprint mold is characterized in that the resin layer overlying the substrate surface having an opening part forms the three-dimensional structure pattern according to the opening density of the opening part. The resin layer is formed on the upper part of the opening part. Since a part of the resin is used for embedding the opening part, the resin layer forms the three-dimensional structure pattern in a self-forming manner according to the opening density of the opening part. Therefore, a stepwise shape three-dimensional structure pattern having a different height can be formed by controlling the opening density of the opening part on the substrate. COPYRIGHT: (C)2009,JPO&INPIT
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