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发明名称
摘要
申请公布号
JP4176365(B2)
申请公布日期
2008.11.05
申请号
JP20020082716
申请日期
2002.03.25
申请人
发明人
分类号
H01L21/3065;C23F1/00;H01L21/311
主分类号
H01L21/3065
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