发明名称 |
MEMS switch and manufacturing method thereof |
摘要 |
A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.
|
申请公布号 |
US7446634(B2) |
申请公布日期 |
2008.11.04 |
申请号 |
US20060429364 |
申请日期 |
2006.05.08 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JEONG HEE-MOON;KWON SANG-WOOK;KIM CHE-HEUNG;KIM JONG-SEOK;KIM JUN-O;HONG YOUNG-TACK;SONG IN-SANG;LEE SANG-HUN |
分类号 |
H01H51/22 |
主分类号 |
H01H51/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|