PROBE CARD OF SEMICONDUCTOR DEVICE TEST APPARATUS AND METHOD FOR POSITIONING CORRECTION OF PROBE BLOCK IN THE PROBE CARD

摘要

A probe card of semiconductor device test apparatus and a method for positioning correction of probe block in the probe card are provided to adjust the height of the probe block and the bent of the probe block to left and right directions. The probe card(10) of the apparatus for inspection of semiconductor comprises a substrate having the single-side faced with the inspection target object; probe blocks of multiple having probe(400) for the electric signal connection between the single-side of substrate and the inspection target object; a plurality of pressurization members(500) pressurizing the probe block for correcting the position of probe block individually. The pressurization members are positioned adjacent to one side of the probe block.