发明名称 AIR WASHING METHOD FOR CLEAN ROOMS
摘要 An air washing method for clean rooms is provided to increase the removal efficiency of the contaminant of the gaseous by setting up the heating humidification part and cooling part in the air washer shear. An air washing method for clean rooms includes the step of spraying the liquid on the air flowed in the duct(100); the step of separating the liquid among the air passing the air washer step through the eliminator(500); the step of supplying the liquid separated from the isolation step through the pump to the air washer. The air washing method for clean rooms can reduce the consumption of water compare to the existing system by reusing the water stored in a hot water tank(220), and a cool water tank(420) in the heating humidification part(200) and air washer.
申请公布号 KR20080096931(A) 申请公布日期 2008.11.04
申请号 KR20070041851 申请日期 2007.04.30
申请人 SUNGLIM PLANT SYSTEM CO., LTD.;HWANG, KWANG HO 发明人 HWANG, KWANG HO;SON, SEUNG WOO
分类号 H01L21/02;H01L21/00 主分类号 H01L21/02
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