发明名称 Method for manufacturing thin film transistor
摘要 An exemplary photomask ( 150 ) has a slit. The slit has at least one turning region (D 1 ) and at least one other regions, and the slit at the at least one turning region has a narrower width than the slit at the at least one other regions. An exemplary method for manufacturing a thin film transistor (TFT) using the photomask is also provided.
申请公布号 US7445970(B2) 申请公布日期 2008.11.04
申请号 US20060580610 申请日期 2006.10.12
申请人 INNOLUX DISPLAY CORP. 发明人 LAI CHIEN-TING
分类号 H01L21/00 主分类号 H01L21/00
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