发明名称 |
Electronically-variable immersion electrostatic lens |
摘要 |
One embodiment relates to an electronically-variable electrostatic immersion lens in an electron beam apparatus. The electrostatic immersion lens includes a top electrode configured with a first voltage applied thereto, an upper bottom electrode configured with a second voltage applied thereto, and a lower bottom electrode configured with a third voltage applied thereto. The third voltage is controlled separately from the second voltage. Other embodiments are also disclosed.
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申请公布号 |
US7446320(B1) |
申请公布日期 |
2008.11.04 |
申请号 |
US20050260586 |
申请日期 |
2005.10.26 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORPROATION |
发明人 |
MCCORD MARK A.;BERTSCHE KIRK J.;MACHUCA FRANCISCO |
分类号 |
H01J37/12 |
主分类号 |
H01J37/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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