| 摘要 |
Illumination systems are disclosed that illuminate a surface (M) for irradiation with illumination light emitted from a light source ( 5 ). An exemplary illumination system includes an incidence-side reflection-type fly-eye optical system ( 12 ) having multiple reflection-type partial optical systems arranged in rows, an emission-side reflection-type fly-eye optical system ( 14 ) having multiple reflection-type partial optical systems arranged in rows and corresponding to respective reflection-type partial optical systems of the incidence-side reflection-type fly-eye optical system ( 12 ), and a condensing optical system including two reflecting mirrors ( 18, 20 ) that guide illumination light, reflected by the emission-side reflection-type fly-eye optical system ( 14 ), to the surface (M). The center of curvature of at least one of the reflecting mirrors is optically eccentric with respect to a normal to the surface for irradiation at the center of the illuminated region.
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