| 摘要 |
A miniaturized electro-optical device having a first zone facing a second zone, a first condenser plate, a second condenser plate arranged in the second zone and smaller than or equal to the first condenser plate, an intermediate space between both zones, with a conductive element arranged therein and which is independent from the side walls and moves thereacross the space depending on voltages present across both plates, two inlet/outlet points for light of an optical circuit, where the conductive element modifies the state of passage of light between the inlet/outlet points, when it is in contact with the stop. The device can be used, for example, as an accelerometer, a tiltmeter, a Coriolis force detector, a microphone, for acoustic applications, for the manufacture of an optical switching matrix, for the projection of images or as a pressure flowrate, temperature, gas, sensor.
|
