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发明名称
狭缝式涂布机之涂布液供应装置
摘要
本发明公开一种狭缝式涂布机之涂布液供应装置,该涂布液供应装置包含:活塞;气缸,其形成插入活塞并使活塞在水平方向上做往复运动之活塞滑行部,并形成在该活塞滑行部末端朝上下方向扩张空间之扩管部。本发明中在狭缝喷嘴上部沿水平方向设置用于供应涂布液的泵,从而缩短了涂布液之供应路径,在解决输出延迟引发之问题的同时可以实现泵容量之大型化,具有提高狭缝涂布机效能之效果。
申请公布号
TW200842523
申请公布日期
2008.11.01
申请号
TW097114021
申请日期
2008.04.17
申请人
K C 科技股份有限公司
发明人
赵康一
分类号
G03F7/26(2006.01);H01L21/027(2006.01)
主分类号
G03F7/26(2006.01)
代理机构
代理人
陈长文
主权项
地址
南韩
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