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发明名称
曝光设备及装置制造方法
摘要
一种扫描曝光设备包含有第一及第二遮光板,设置于一照明光学系统内,以供照射一原件,该等板界定出该原件上一个会在扫描方向上被照射的区域。此扫描曝光设备进一步包含有一旋转机构,可将第一及第二遮光板中至少一者在一垂直于该照明光学系统之光轴的平面上转动,以在一垂直于扫描方向的方向上调整宽度的分布,该等宽度之每一者均是该区域在扫描方向上的宽度。
申请公布号
TW200842504
申请公布日期
2008.11.01
申请号
TW096148076
申请日期
2007.12.14
申请人
佳能股份有限公司
发明人
西村慎二
分类号
G03F7/20(2006.01)
主分类号
G03F7/20(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本
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