CORIOLIS MASS FLOW CONTROLLER

摘要

A CAPACITIVE PICK OFF SENSOR FOR MASS FLOW MEASUREMENT DEVICE IS DISCLOSED . THE MASS FLOW MEASUREMENT DEVICE INCLUDES A FLOW SENSOR TUBE AND A DRIVE FOR VIBRATING THE FLOW SENSOR TUBE . THE CAPACITIVE PICK OFF SENSOR INCLUDES AT LEAST ONE CONDUCTIVE PLATE CONNECTABLE TO A FIRST VOLTAGE POTENTIAL AND ADAPTED TO BE SITUATED ADJACENT THE FLOW SENSOR TUBE WHICH IS CONNECTED TO A SECOND VOLTAGE POTENTIAL. THE CONDUCTIVE PLATE IS POSITIONED RELATIVE TO THE FLOW SENSOR TUBE SO AS TO DEFINE A GAP THEREBETWEEN THE CAPACITANCE BETWEEN THE CONDUCTIVE PLATE AND THE FLOW SENSOR TUBE VARIES DUE TO THE RELATIVE MOTION OF THE CONDUCTIVE PLATE AND THE FLOW SENSOR TUBE WHEN THE FLOW SENSOR TUBE IS VIBRATED . IN OTHER ASPECTS OF THE PRESENT INVENTION, THE FLOW SENSOR TUBE IS SITUATED IN A HOUSING AND THE DRIVE DEVICE IS POSITIONED OUTSIDE THE HOUSING FOR VIBRATING THE FLOW SENSOR TUBE.