发明名称 |
SYSTEM AND METHOD FOR DELIVERING VAPOR |
摘要 |
A system and method for providing a vapor are described. In one variation, liquid is placed in a containment vessel, and a pressure in the containment vessel is reduced below atmospheric pressure. The pressure in the vessel is monitored and the liquid is heated in response to the sensed pressure falling below a desired level. When needed, the vapor is delivered from the liquid containment vessel to the external system.
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申请公布号 |
KR20080096684(A) |
申请公布日期 |
2008.10.31 |
申请号 |
KR20087021356 |
申请日期 |
2008.09.01 |
申请人 |
ADVANCED ENERGY INDUSTRIES, INC. |
发明人 |
TOMASEL FERNANDO GUSTAVO;MAUCK JUSTIN;GONZALEZ JUAN JOSE |
分类号 |
B01J3/00;B01F3/04;B01J7/00 |
主分类号 |
B01J3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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