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发明名称
certified reference material for calibrating of defect inspection apparatus of semiconductor and its manufacturing method
摘要
申请公布号
KR100866451(B1)
申请公布日期
2008.10.31
申请号
KR20020032992
申请日期
2002.06.12
申请人
发明人
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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