摘要 |
PROBLEM TO BE SOLVED: To provide a photodetector and a radiation detecting device which can maintain a high ratio of area occupation by a photoelectric conversion device and can improve a manufacturing yield. SOLUTION: A plurality of radiation receiving modules are provided on a circuit substrate while such a radiation receiving module is provided with a two-dimensional scintillator array 54 and a photoelectric conversion device. The photoelectric conversion device is provided with a substrate 51 and a photodiode array 53 buried into groove 52 formed on the upper surface of the substrate 51. The two-dimensional scintillator array 54 is provided with scintillator elements 59 arranged corresponding to a photodiode element 55 provided on the photodiode array 53, and separators 60 arranged between the scintillator elements 59. The photoelectric conversion device is provided with such a structure, whereby the manufacturing yield is improved, and the occupation area of the photoelectric conversion element, i.e., the photodiode element 55 on the substrate 51 is improved. COPYRIGHT: (C)2009,JPO&INPIT
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