发明名称 MOS TYPE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a MOS type semiconductor device having a top gate structure capable of improving latch-up withstand without increasing an on voltage, and to provide a method of manufacturing the MOS type semiconductor device. SOLUTION: In the MOS type semiconductor device having a top gate structure, a cathode electrode 21 comes into contact with the surface of the other-conductivity-type base region 3 sandwiched between a one-conductivity-type emitter region 5 and a one-conductivity-type region 2 via a fourth opening 100 provided partially through a gate oxide film 12 covering the surface, a gate electrode 20, and an interlayer insulating film 13. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008262998(A) 申请公布日期 2008.10.30
申请号 JP20070103386 申请日期 2007.04.11
申请人 FUJI ELECTRIC DEVICE TECHNOLOGY CO LTD 发明人 YOSHIKAWA ISAO
分类号 H01L29/739;H01L21/336;H01L29/78 主分类号 H01L29/739
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