| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope device in which an electron gun is maintained in vacuum. SOLUTION: The scanning electron microscope 1 is provided with an electron gun 2 in which a metal film, a carbon film, a diamond film, and a diamond-like carbon film which transmit accelerating electrons and can endure the atmosphere are provided at the electron gun window 35, and a sealed container 33 is maintained in vacuum. COPYRIGHT: (C)2009,JPO&INPIT
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