| 摘要 |
PROBLEM TO BE SOLVED: To provide a tilt angle sensor device capable of making the accuracy of working of a spacer have flexibility. SOLUTION: The tilt angle sensor device 1 has a three-layered structure wherein a spacer 4 having a slit 41 is interposed by a bottom electrode layer 2 having a common electrode 22 on its top surface, and a top electrode layer 3 having counter electrodes 32, 33 on its undersurface. By interposing a capacitance medium between the common electrode 22 and the counter electrodes 32, 33, a capacitor composed by sandwiching the capacitance medium between the common electrode 22 and the counter electrodes 32, 33 is formed. The capacitance medium is constituted of a conductive liquid 6 which is injected into the slit 41 blocked up by the electrode layers 2, 3 as a cavity 5 so as to occupy a part of its volume, and into which the common electrode 22 is dipped, and an insulating film 35 whose one surface is dipped in the conductive liquid 6 and the other surface is joined to the counter electrodes 32, 33. COPYRIGHT: (C)2009,JPO&INPIT
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