摘要 |
Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increase laser performance over the life of the chamber, or both. Operationally, the inter-electrode spacing may be adjusted to maintain a specific target gap distance between the electrodes or to optimize a specific parameter of the laser output beam such as bandwidth, pulse-to-pulse energy stability, beam size, etc. |
申请人 |
CYMER, INC. (A NEVADA CORPORATION);SANDSTROM, RICHARD, L.;CHUNG, TAE, H.;UJAZDOWSKI, RICHARD, C. |
发明人 |
SANDSTROM, RICHARD, L.;CHUNG, TAE, H.;UJAZDOWSKI, RICHARD, C. |