发明名称 Semiconductor mfr - using selective deep impurity diffusion to form zener diodes
摘要 <p>Method of forming a component within a semi-conductor substrate of one conductivity type comprises (a) diffusing an impurity of opposite conductivity type within a surface portion of the substrate (b) forming a dielectric layer over at least a part of the surface portion, the dielectric layer being capable of rejecting the impurity of opposite conductivity type, and (c) diffusing the impurity of opposite conductivity type deeper into the substrate to form a region of opposite conductivity type within the substrate such that the portion of the region directly under the dielectric layer is of higher conductivity than the remaining portion of the region.</p>
申请公布号 FR2130354(A1) 申请公布日期 1972.11.03
申请号 FR19720009316 申请日期 1972.03.17
申请人 ITT INDUSTRIES INC 发明人
分类号 H01L21/225;H01L23/29;H01L29/00;(IPC1-7):01L7/00;01L9/00 主分类号 H01L21/225
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