发明名称 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
摘要 A semiconductor memory device and a method of fabricating the same are provided to prevent a solution of metal silicide from remaining between wordlines by disposing active regions under the wordlines in a wordline contact region. A semiconductor memory device includes a first and second memory cell; a first active region(AA) for line and space structure; a memory cell array region having a floating gate and control gate electrode in the first active region; a wordline contact region having a second active region, adjacent to the memory cell array region; a first and second wordline disposed in the memory cell array region and word line contact region, served as a control gate electrode for the first and second memory cell. A dummy gate electrode is disposed under the first and second worldline in the second active region.
申请公布号 KR20080096473(A) 申请公布日期 2008.10.30
申请号 KR20080038986 申请日期 2008.04.25
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MAEKAWA HIDEAKI
分类号 H01L21/8247 主分类号 H01L21/8247
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