RIGID RF TRANSMISSION LINE WITH EASY REMOVAL SECTION
摘要
An RF feed for a processing apparatus is disclosed. Coupling an RF generator to an RF matching network by a rigid RF feed lessens the amount of power that is lost during transmission from the generator to the matching network. The rigid RF feed comprises an inverted J shaped section that decouples the generator from the matching network whenever servicing the chamber is necessary. The J shape section has two parallel portions coupled together by a perpendicular portion. The J shaped section may be removed as a one piece assembly by uncoupling the J shaped section at a location disposed near the top of the chamber and a location near the floor of the chamber. The connections between the J shaped section and the remainder of the RF feed face the same direction to ensure easy coupling and decoupling without twisting and/or bending any portion of the rigid RF feed.
申请公布号
WO2008106499(A3)
申请公布日期
2008.10.30
申请号
WO2008US55100
申请日期
2008.02.27
申请人
APPLIED MATERIALS, INC.;SORENSEN, CARL, A.;WHITE, JOHN, M.;NEILL, KIM, C.