| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS switch with downsizing aimed at and an integrated circuit equipped with the same by dint of magnetic drive capable of putting on/off a large-capacity current. SOLUTION: A support part 2 is erected on a silicon substrate 1 by an MEMS (Micro Electro-mechanical System) technology, and at a tip end of the support part 2, a plate-like magnetic body 3 is provided put in parallel with the surface of the silicon substrate 1. A first contact point 4 is fitted at an inside of one end of the magnetic body 3, and in opposition to it, a second contact point 6 is fitted on the silicon substrate 1. When the magnetic body 3 is imparted with magnetism from the side of the silicon substrate 1, the latter is suctioned and bent, the first contact point 4 comes in contact with the second contact point 6 to have the switch put on, and when the magnetism is gone, the magnetic body 3 returns to a standby position. COPYRIGHT: (C)2009,JPO&INPIT
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