| 摘要 |
The semiconductor device testing apparatus according to the present invention has a testing LSI; a power supply unit; and an intermediate substrate provided so that there is a connection between the testing LSI, and the power supply unit and tester. The testing LSI has a testing circuit and a waveform shaping circuit; a dielectric material layer disposed so as to face a tested semiconductor device; an electrode disposed in a position that corresponds to a position of an external terminal electrode of the tested semiconductor device on a surface of the dielectric material layer facing the tested semiconductor device; and a first penetrating electrode that passes completely through the dielectric material layer, is connected to the electrode, and is used for exchanging signals with the exterior. The power supply unit has mutually independent elastic probe pins that are disposed in positions that correspond to power electrodes of the tested semiconductor device, and that are provided with a metal protrusion at the distal ends thereof; a substrate that is electrically connected to the probe pins and on which a first wiring layer is formed; and a second penetrating electrode that passes through the substrate.
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